XUV/极紫外透射光栅
定制透射光栅，可用于光谱仪，光束轮廓监测和分束。
Ta/SiN双涂层或SiN单涂层自支撑光栅，具有侧壁粗糙度低，清晰度高等特点，非常适用于XUV衍射实验
- 产地：
- 型号：
- 品牌：
描述：
- 薄膜上的衍射光栅或自支撑透射光栅
- 1维光栅
Ø 线
- 2维光栅
Ø 正方形/棋盘格
Ø 圆孔
Ø 以六边形排列的圆
- 用于光谱学、极紫外光刻及其他应用
- 多用材料可选（Cr, Si, Au, Ni, SiO2, Ir, Diamond)）
规格和参数
参数 | 典型值 |
光栅区域 | Typical 1 x 1 mm, 2 x 2 mm, up to 3 x 3 mm possible |
典型光栅周期 | 100 nm – 10.000 nm |
材料 | e.g. Cr/Au/SiO2 on 100 nm Si3N4，自支撑结构请咨询 |
典型的支持框尺寸 | 3 x 3 mm or 6 x 6 mm |
用于X射线自由电子激光和高功率激光的金刚石加工案例：
发表文章：
S. Marathe et al. Development of synchrotron pink beam x-ray grating interferometer at the Diamond Light source I13-2 beamline Developments in X-Ray Tomography XII 11113 (2019) p. 1111319
C. David et al. Differential phase-contrast imaging using a grating interferometer Applied Physics Letters 81 (2002) p. 3287
F. Pfeiffer et al. Phase retrieval and differential phase-contrast imaging with low-brilliance X-ray sources Nature Physics 2 (2006) p. 258
I. Zanette et al. Two-Dimensional X-ray Grating Interferometer Physical Review Letters 105 (2010) p. 248102
Y. Kayser et al. Wavefront metrology measurements at SACLA by means of x-ray grating interferometry Optics Express 22 (2014) p. 9004
S. Rutishauser et al. Exploring the wavefront of hard x-ray free electron laser radiation Nature Communications 3 (2012), p. 947
规格和参数
参数 | 典型值 |
光栅区域 | Typical 1 x 1 mm, 2 x 2 mm, up to 3 x 3 mm possible |
典型光栅周期 | 100 nm – 10.000 nm |
材料 | e.g. Cr/Au/SiO2 on 100 nm Si3N4，自支撑结构请咨询 |
典型的支持框尺寸 | 3 x 3 mm or 6 x 6 mm |
- 用于光谱学、
- 极紫外光刻、极紫外干涉光刻
- 光束轮廓检测
- 分束等
- 同步辐射及自由电子激光波前检测
发表文章：
S. Marathe et al. Development of synchrotron pink beam x-ray grating interferometer at the Diamond Light source I13-2 beamline Developments in X-Ray Tomography XII 11113 (2019) p. 1111319
C. David et al. Differential phase-contrast imaging using a grating interferometer Applied Physics Letters 81 (2002) p. 3287
F. Pfeiffer et al. Phase retrieval and differential phase-contrast imaging with low-brilliance X-ray sources Nature Physics 2 (2006) p. 258
I. Zanette et al. Two-Dimensional X-ray Grating Interferometer Physical Review Letters 105 (2010) p. 248102
Y. Kayser et al. Wavefront metrology measurements at SACLA by means of x-ray grating interferometry Optics Express 22 (2014) p. 9004
S. Rutishauser et al. Exploring the wavefront of hard x-ray free electron laser radiation Nature Communications 3 (2012), p. 947