Polycapillary Optics
Polycapillary X-ray Optics to improve X-ray analysis performance and capability, for Micro XRF and XRD.
- Model：
Polycapillary to improve X-ray analysis performance and capability for Micro XRF and XRD
A polycapillary optic captures a large solid angle of X-rays from an X-ray source and redirects them to a micron-sized focal spot or a highly collimated beam. The X-ray intensity achieved with such optics is a few orders of magnitude higher than that obtained with conventional pinhole collimators, contributing to the significantly improved X-ray analysis performance in detection sensitivity, spatial resolution, measurement speed, and precision. XOS optics are widely used in commercial instruments and customized X-ray analysis systems for various industrial and research applications in the fields such as microelectronics, semiconductor manufacturing, pharma, and life sciences.
Features
• X-ray flux density gain up to 10,000 times greater than conventional pinhole collimator
• Focal spot as small as 5µm
• Broad spectral bandwidth: 10eV-50keV
Benefits
• Significantly improved measurement speed for fine-feature analysis and high-resolution mapping
• Halo reduction optics optimized for high-energy applications
• Large, quasi-parallel X-ray beam for XRD and XRF
• Customized optic design for optimal performance
Custom Optic Solutions
XOS offers custom polycapillary X-ray optic solutions based on customer application requirements. Below are just typical X-ray optic geometries, performance specifications and applications.
Focusing Optics |
Applications include micro-XRF for elemental mapping, plating thickness and fine feature analysis. | |||||||
Working distance (mm) | 2 | 4 | 9 | 20 | 50 | 100 | 200 | |
Focal spot size* (µm, FWHM, 17.4keV) |
7 |
15 |
25 |
45 |
100 |
180 |
300 | |
Intensity gain* (vs а plnhole collimator of same size, 100mm fгom the source) |
6000 |
4500 |
3500 |
2000 |
800 |
300 |
120 | |
Note: *With а 100μm X-ray source.
Half-focusing Optics (XRF/XAS) | Applications include micro XRF, micro XAS, and confocal XRF. | |||||
Working distance (mm) | 2 | 4 | 9 | 20 | 50 | |
Focal spot size* (µm, FWHM, 17.4keV) |
7 |
15 |
25 |
45 |
100 | |
Intensity gain* (vs a pinhole collimator of same size) |
850 |
550 |
400 |
200 |
80 | |
Note: *With an incident beam of 2mm in diameter and a divergent angle of <0.5mrad
Collimating/Parallel Beam Optics (XRD/WDS/XRF) |
Applications include powder XRD, texture and stress analysis, WDS and confocal XRF. | ||||||||
Output beam diameter (mm) | 0.5 | 1 | 2 | 3 | 4 | 6 | 10 | 15 | |
Intensity gain* | 12 | 45 | 130 | 250 | 370 | 470 | 680 | 850 | |
Note: *With а 50μm X-ray source at 8keV, The lFD of the optics is 18mm and the output divergent angle is 0.2 degree.
Applications
• Micro-XRF for elemental mapping, plating thickness, and fine feature analysis
• Confocal XRF analysis and wavelength-dispersive spectrometer (WDS)
• Synchrotron-based micro X-ray analysis (Micro-XRF, micro-XAS and confocal XRF)
• Powder XRD, texture and stress analysis
Download
XOS_Polycapillary_Optics_datasheet